IEEE - Institute of Electrical and Electronics Engineers, Inc. - Surface-cleanliness inspection apparatus for optical component based on machine vision

2010 3rd International Congress on Image and Signal Processing (CISP)

Author(s): Hongyu Chu ; Zhijiang Xie ; Qin Liu ; Yanhua Shao ; Zengzhen Mi
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 October 2010
Conference Location: Yantai, China, China
Conference Date: 16 October 2010
Volume: 4
Page(s): 1,694 - 1,698
ISBN (CD): 978-1-4244-6515-6
ISBN (Electronic): 978-1-4244-6516-3
ISBN (Paper): 978-1-4244-6513-2
DOI: 10.1109/CISP.2010.5647763
Regular:

In high-power laser systems, such as NIF and SG-III, the contamination existing on the optical surfaces will reduce the performance of load and even lead damage to optical components. It is... View More

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