IEEE - Institute of Electrical and Electronics Engineers, Inc. - A new method of estimating null time in ellipsometry

2010 3rd International Congress on Image and Signal Processing (CISP)

Author(s): Long Gao ; Chunhui Wang ; Yanchao Li ; Haifang Cong ; Yang Qu
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 October 2010
Conference Location: Yantai, China, China
Conference Date: 16 October 2010
Volume: 5
Page(s): 2,461 - 2,464
ISBN (CD): 978-1-4244-6515-6
ISBN (Electronic): 978-1-4244-6516-3
ISBN (Paper): 978-1-4244-6513-2
DOI: 10.1109/CISP.2010.5647838
Regular:

A new method which can estimate the null time in the ellipsometry is developed in order to measure precisely the thickness and refractive index of thin film. Ten images are taken consecutively at... View More

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