IEEE - Institute of Electrical and Electronics Engineers, Inc. - High efficiency broadband polarization rotator on silicon-on-insulator

2010 7th IEEE International Conference on Group IV Photonics (GFP)

Author(s): Vermeulen, D. ; Selvaraja, S. ; Verheyen, P. ; Bogaerts, W. ; Van Thourhout, D. ; Roelkens, G.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 September 2010
Conference Location: Beijing, China, China
Conference Date: 1 September 2010
Page(s): 42 - 44
ISBN (CD): 978-1-4244-6345-9
ISBN (Electronic): 978-1-4244-6346-6
ISBN (Paper): 978-1-4244-6344-2
DOI: 10.1109/GROUP4.2010.5643432
Regular:

We demonstrate a polarization rotator fabricated using a 4 etch-step CMOS-compatible process including layer depositions on a silicon-on-insulator wafer by means of 193nm deep UV... View More

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