IEEE - Institute of Electrical and Electronics Engineers, Inc. - Preparation and properties of in-situ YBaCuO films on Si substrates with buffer layers

Author(s): X.F. Meng ; F.S. Pierce ; K.M. Wong ; R.S. Amos ; C.H. Xu ; B.S. Deaver, Jr. ; S.J. Poon
Sponsor(s): IEEE Magnetics Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 March 1991
Volume: 27
Page Count: 4
Page(s): 1,638 - 1,641
ISSN (Paper): 0018-9464
ISSN (Online): 1941-0069
DOI: 10.1109/20.133499
Regular:

High-T/sub c/ YBaCuO superconducting films have been prepared in-situ on Si substrates with buffer layers using off-axis single-target RF magnetron sputtering. A special cylinder heater with a... View More

Advertisement