IEEE - Institute of Electrical and Electronics Engineers, Inc. - Investigation of variants of power supply schemes for microwave magnetron average power for plasma processing of materials

2010 20th International Crimean Conference "Microwave & Telecommunication Technology" (CriMiCo 2010)

Author(s): S I Madveyko
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 September 2010
Conference Location: Sevastopol, Ukraine
Conference Date: 13 September 2010
Page(s): 1,099 - 1,100
ISBN (CD): 978-966-335-334-0
ISBN (Paper): 978-1-4244-7184-3
DOI: 10.1109/CRMICO.2010.5632840
Regular:

The results of experimental research of plasma radiation optical signal depending on the pressure in the plasmatron chamber, using the different electrical networks of microwave magnetron power... View More

Advertisement