IEEE - Institute of Electrical and Electronics Engineers, Inc. - Express method of determination of the gas pressure optimal for microwave plasma chemical materials processing

2010 20th International Crimean Conference "Microwave & Telecommunication Technology" (CriMiCo 2010)

Author(s): S V Bordusov ; S I Madveiko ; A P Dostanko
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 September 2010
Conference Location: Sevastopol, Ukraine
Conference Date: 13 September 2010
Page(s): 779 - 780
ISBN (CD): 978-966-335-334-0
ISBN (Paper): 978-1-4244-7184-3
DOI: 10.1109/CRMICO.2010.5632811
Regular:

A method of rapid determination of gas pressure value, which provides the most favorable conditions for microwave plasma chemical processing at low vacuum, is developed. The method is based on the... View More

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