IEEE - Institute of Electrical and Electronics Engineers, Inc. - Method of microwave scanning tomography of electrical properties of semiconductors

2010 20th International Crimean Conference "Microwave & Telecommunication Technology" (CriMiCo 2010)

Author(s): S I Melnik ; J O Gordienko
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 September 2010
Conference Location: Sevastopol, Ukraine
Conference Date: 13 September 2010
Page(s): 721 - 722
ISBN (CD): 978-966-335-334-0
ISBN (Paper): 978-1-4244-7184-3
DOI: 10.1109/CRMICO.2010.5632574
Regular:

The technique of microwave diagnostics of semiconductors with arbitrary distribution of electrical properties in depth has been developed. It has been proposed to conduct the scanning of the value... View More

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