IEEE - Institute of Electrical and Electronics Engineers, Inc. - Performance study of current-controlled versus voltage-controlled radio frequency power generator at low sampling frequency

2010 IEEE International Symposium on Industrial Electronics (ISIE 2010)

Author(s): Bialasiewicz, J.T. ; Bowers, W.J.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 July 2010
Conference Location: Bari, Italy, Italy
Conference Date: 4 July 2010
Page(s): 3,298 - 3,303
ISBN (CD): 978-1-4244-6391-6
ISBN (Electronic): 978-1-4244-6392-3
ISBN (Paper): 978-1-4244-6390-9
DOI: 10.1109/ISIE.2010.5637572
Regular:

This paper presents an approach to radio frequency (RF) power control along a power curve specified as a function of load impedance, which varies with time. The control algorithm was developed to... View More

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