IEEE - Institute of Electrical and Electronics Engineers, Inc. - Design of low-noise CMOS MEMS accelerometer with techniques for thermal stability and stable DC biasing

2010 IEEE Custom Integrated Circuits Conference -CICC 2010

Author(s): Tan, S.S. ; Liu, C.Y. ; Yeh, L.K. ; Chiu, Y.H. ; Lu, M.S.-C. ; Hsu, K.Y.J.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 September 2010
Conference Location: San Jose, CA, USA, USA
Conference Date: 19 September 2010
Page(s): 1 - 4
ISBN (CD): 978-1-4244-5759-5
ISBN (Electronic): 978-1-4244-5760-1
ISBN (Paper): 978-1-4244-5758-8
ISSN (CD): 0886-5930
ISSN (Electronic): 2152-3630
ISSN (Paper): 0886-5930
DOI: 10.1109/CICC.2010.5617382
Regular:

An integrated high-sensitivity CMOS MEMS capacitive accelerometer with thermal stability has been designed and demonstrated in this work. Issue of obtaining stable DC bias at input terminals is... View More

Advertisement