IEEE - Institute of Electrical and Electronics Engineers, Inc. - Study on deposition of amorphous DLC films for CO 2 laser by RF-PECVD

2010 10th Russian-Chinese Symposium on Laser Physics and Laser Technologies (RCSLPLT) & 2010 Academic Symposium on Optoelectronics Technology (ASOT)

Author(s): Ji-long Tang ; Guo-jun Liu ; Xiu-hua Fu ; Jing Wang
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 July 2010
Conference Location: Harbin, China, China
Conference Date: 28 July 2010
Page(s): 120 - 124
ISBN (CD): 978-1-4244-5512-6
ISBN (Electronic): 978-1-4244-5513-3
ISBN (Paper): 978-1-4244-5511-9
DOI: 10.1109/RCSLPLT.2010.5615381
Regular:

The CO2 laser is widely used in material processing and military field for its high output power. So a high damage threshold is especially necessary for the component of the CO2 laser system. This... View More

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