IEEE - Institute of Electrical and Electronics Engineers, Inc. - Investigation and analysis of a MOEMS gyroscope based on novel resonator

2010 10th Russian-Chinese Symposium on Laser Physics and Laser Technologies (RCSLPLT) & 2010 Academic Symposium on Optoelectronics Technology (ASOT)

Author(s): Zhao Min ; Yan Shubin ; Yan Yingzhan ; Jia Pengfei ; Liu Zheng ; Li Jie ; Liu Jun
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 July 2010
Conference Location: Harbin, China, China
Conference Date: 28 July 2010
Page(s): 337 - 340
ISBN (CD): 978-1-4244-5512-6
ISBN (Electronic): 978-1-4244-5513-3
ISBN (Paper): 978-1-4244-5511-9
DOI: 10.1109/RCSLPLT.2010.5615307
Regular:

In this paper, a micro-optical-electro-mechanical system (MOEMS) gyroscope was developed taking a new optical microcavity - planar microdisk cavity as the core sensing element. The planar... View More

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