IEEE - Institute of Electrical and Electronics Engineers, Inc. - Investigation of characteristic for the combination of MEMS mirror and F-theta lens applied in all fiber coupled infrared heterodyne interferometry
2010 10th Russian-Chinese Symposium on Laser Physics and Laser Technologies (RCSLPLT) & 2010 Academic Symposium on Optoelectronics Technology (ASOT)
Author(s): | Long Gao ; Chunhui Wang |
Publisher: | IEEE - Institute of Electrical and Electronics Engineers, Inc. |
Publication Date: | 1 July 2010 |
Conference Location: | Harbin, China, China |
Conference Date: | 28 July 2010 |
Page(s): | 262 - 265 |
ISBN (CD): | 978-1-4244-5512-6 |
ISBN (Electronic): | 978-1-4244-5513-3 |
ISBN (Paper): | 978-1-4244-5511-9 |
DOI: | 10.1109/RCSLPLT.2010.5615280 |
Regular:
Heterodyne interferometer is a well-know optical device widely used in a variety of applications, including mapping the surface of glass, measuring the thickness of the film, and obtaining the... View More