IEEE - Institute of Electrical and Electronics Engineers, Inc. - Investigation of characteristic for the combination of MEMS mirror and F-theta lens applied in all fiber coupled infrared heterodyne interferometry

2010 10th Russian-Chinese Symposium on Laser Physics and Laser Technologies (RCSLPLT) & 2010 Academic Symposium on Optoelectronics Technology (ASOT)

Author(s): Long Gao ; Chunhui Wang
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 July 2010
Conference Location: Harbin, China, China
Conference Date: 28 July 2010
Page(s): 262 - 265
ISBN (CD): 978-1-4244-5512-6
ISBN (Electronic): 978-1-4244-5513-3
ISBN (Paper): 978-1-4244-5511-9
DOI: 10.1109/RCSLPLT.2010.5615280
Regular:

Heterodyne interferometer is a well-know optical device widely used in a variety of applications, including mapping the surface of glass, measuring the thickness of the film, and obtaining the... View More

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