IEEE - Institute of Electrical and Electronics Engineers, Inc. - Observations and analysis of extreme ultraviolet emission by capillary discharge with Xe as target

2010 10th Russian-Chinese Symposium on Laser Physics and Laser Technologies (RCSLPLT) & 2010 Academic Symposium on Optoelectronics Technology (ASOT)

Author(s): Xu Qiang ; Zhao Yong-peng ; Guan Zhi-liang ; Zhang Ye ; Wang Qi ; Li Qi
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 July 2010
Conference Location: Harbin, China, China
Conference Date: 28 July 2010
Page(s): 213 - 216
ISBN (CD): 978-1-4244-5512-6
ISBN (Electronic): 978-1-4244-5513-3
ISBN (Paper): 978-1-4244-5511-9
DOI: 10.1109/RCSLPLT.2010.5615265
Regular:

The first capillary discharge produced plasma extreme ultraviolet source has been started in China. Fundamental characteristics of DPP including current, Xe gas pressure, extreme ultraviolet... View More

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