IEEE - Institute of Electrical and Electronics Engineers, Inc. - Adaptive high precision control for piezo-actuated nano-positioner

2010 IEEE International Symposium on Intelligent Control (ISIC) part of the IEEE Multi-Conference on Systems & Control (MSC)

Author(s): Ozaki, T. ; Xinkai Chen
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 September 2010
Conference Location: Yokohama, Japan, Japan
Conference Date: 8 September 2010
Page(s): 2,278 - 2,283
ISBN (CD): 978-1-4244-5361-0
ISBN (Paper): 978-1-4244-5360-3
ISSN (CD): pending
ISSN (Paper): pending
DOI: 10.1109/ISIC.2010.5612884
Regular:

The piezo-actuated nano-positioner is composed of a piezoelectric actuator (PEA) and a positioning mechanism (PM). Due to the existence of hysteretic nonlinearity in the PEA and the friction... View More

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