IEEE - Institute of Electrical and Electronics Engineers, Inc. - Silicon micromachining technology for THz applications

2010 35th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz 2010)

Author(s): Jung, C. ; Lee, C. ; Thomas, B. ; Chattopadhyay, G. ; Peralta, A. ; Lin, R. ; Gill, J. ; Mehdi, I.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 September 2010
Conference Location: Rome, Italy, Italy
Conference Date: 5 September 2010
Page(s): 1 - 3
ISBN (CD): 978-1-4244-6656-6
ISBN (Electronic): 978-1-4244-6657-3
ISBN (Paper): 978-1-4244-6655-9
DOI: 10.1109/ICIMW.2010.5612771
Regular:

Silicon micromachining technology is naturally suited for making THz components, where precision and accuracy are essential. We report here the development of a robust micromachining technology... View More

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