IEEE - Institute of Electrical and Electronics Engineers, Inc. - Triaxial accelerometer design based on meso-piezoresistive effect

2010 International Conference on Computer Application and System Modeling (ICCASM 2010)

Author(s): Huang Kun ; Tingdun Wen
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 October 2010
Conference Location: Taiyuan, China, China
Conference Date: 22 October 2010
Volume: 13
ISBN (Electronic): 978-1-4244-7237-6
ISBN (Paper): 978-1-4244-7235-2
DOI: 10.1109/ICCASM.2010.5622783
Regular:

With the theory of meso-piezoresistive effect, we design a high sensitivity piezoresistive triaxial accelerometer. A three-mass dual-beam geometric micro-structure cavity can be designed by using... View More

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