IEEE - Institute of Electrical and Electronics Engineers, Inc. - Micro-automating semiconductor fabrication

Author(s): I.J. Busch-Vishniac
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 July 1991
Volume: 7
Page Count: 6
Page(s): 32 - 37
ISSN (Paper): 8755-3996
DOI: 10.1109/101.134569
Regular:

Progress in automating very-small-scale mechanical processes is reviewed. The special requirements of microautomation are identified, and three applications are examined. They are positioning,... View More

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