IEEE - Institute of Electrical and Electronics Engineers, Inc. - High precision ANN-based adaptive displacement tracking of piezoelectric actuators for MEMS

2010 8th IEEE International NEWCAS Conference (NEWCAS)

Author(s): Chaoui, H. ; Sicard, P. ; Sawan, M.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2010
Conference Location: Montreal, QC, Canada, Canada
Conference Date: 20 June 2010
Page(s): 85 - 88
ISBN (Electronic): 978-1-4244-6805-8
ISBN (Paper): 978-1-4244-6806-5
ISBN (Online): 978-1-4244-6804-1
DOI: 10.1109/NEWCAS.2010.5603710
Regular:

In this paper, we introduce an artificial neural network (ANN) based motion control methodology of micro actuators for microelectromechanical systems (MEMS). The control strategy is based... View More

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