IEEE - Institute of Electrical and Electronics Engineers, Inc. - The nonliner in MEMS touch mode capacitive devices

2010 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)

Author(s): Yongjian Feng ; Shaojie Wang
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2010
Conference Location: Xiamen, China, China
Conference Date: 20 January 2010
Page(s): 1,154 - 1,159
ISBN (CD): 978-1-4244-6544-6
ISBN (Electronic): 978-1-4244-6545-3
ISBN (Paper): 978-1-4244-6543-9
DOI: 10.1109/NEMS.2010.5592535
Regular:

Capacitive touch MEMS devices have better performance and higher sensitivity than conventional capacitive MEMS device. Because the diaphragm of these capacitive MEMS device touches the substrate... View More

Advertisement