IEEE - Institute of Electrical and Electronics Engineers, Inc. - Defect cluster analysis for wafer-scale integration

Author(s): P.R. Pukite ; C.L. Berman
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 August 1990
Volume: 3
Page Count: 8
Page(s): 128 - 135
ISSN (Paper): 0894-6507
ISSN (Online): 1558-2345
DOI: 10.1109/66.56569
Regular:

A methodology for characterizing spatial defect distributions is presented. A correlation function approach providing spatial information not measurable with classical methods such as... View More

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