IEEE - Institute of Electrical and Electronics Engineers, Inc. - The use and evaluation of yield models in integrated circuit manufacturing

Author(s): J.A. Cunningham
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 May 1990
Volume: 3
Page Count: 12
Page(s): 60 - 71
ISSN (Paper): 0894-6507
ISSN (Online): 1558-2345
DOI: 10.1109/66.53188
Regular:

The development and refinement of net-die-per-wafer yield models during the past 25 years are reviewed, and the models are tested for accuracy by comparison with actual yield data from seven... View More

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