IEEE - Institute of Electrical and Electronics Engineers, Inc. - Liquid crystal spatial light modulators in optical metrology

2010 9th Euro-American Workshop on Information Optics (WIO)

Author(s): Falldorf, C. ; von Kopylow, C. ; Bergmann, R.B.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 July 2010
Conference Location: Helsinki, Finland, Finland
Conference Date: 12 July 2010
Page(s): 1 - 3
ISBN (Electronic): 978-1-4244-8227-6
ISBN (Paper): 978-1-4244-8226-9
DOI: 10.1109/WIO.2010.5582527
Regular:

We provide an overview over recent applications of electronically adressed liquid crystal spatial light modulators (SLM) in the field of optical metrology. Three particular examples are... View More

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