IEEE - Institute of Electrical and Electronics Engineers, Inc. - Integrated intelligent optimized dynamic scheduling of semiconductor fabrication facilities

2010 IEEE International Conference on Automation and Logistics (ICAL)

Author(s): Li Li ; Fei Qiao
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 August 2010
Conference Location: Shatin, Hong Kong, Hong Kong
Conference Date: 16 August 2010
Page(s): 690 - 695
ISBN (Electronic): 978-1-4244-8376-1
ISBN (Paper): 978-1-4244-8375-4
ISBN (Online): 978-1-4244-8374-7
DOI: 10.1109/ICAL.2010.5585372
Regular:

Semiconductor wafer fabrication facilities (fabs) cry for optimized dynamic scheduling approach due to its high uncertainty and complexity. A novel intelligent optimized dynamic scheduling method,... View More

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