IEEE - Institute of Electrical and Electronics Engineers, Inc. - A hot platinum thin film anemometer

2010 11th International Conference on Electronic Packaging Technology & High Density Packaging (ICEPT-HDP)

Author(s): Chuan Liu ; Xiaobing Luo ; Zhuo Zhang ; Xuefang Wang ; Sheng Liu
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 August 2010
Conference Location: Xi'an, China, China
Conference Date: 16 August 2010
Page(s): 1,297 - 1,301
ISBN (CD): 978-1-4244-8141-5
ISBN (Electronic): 978-1-4244-8142-2
ISBN (Paper): 978-1-4244-8140-8
DOI: 10.1109/ICEPT.2010.5582792
Regular:

In this paper, a platinum thin film thermal flow sensor was presented. Design, fabrication process and thermal analysis were presented and discussed. Compared with traditional structure of four... View More

Advertisement