IEEE - Institute of Electrical and Electronics Engineers, Inc. - Precise tracking control of a piezoactuated micropositioning stage based on modified Prandtl-Ishlinskii hysteresis model

2010 IEEE International Conference on Automation Science and Engineering (CASE 2010)

Author(s): Qingsong Xu ; Yangmin Li
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 August 2010
Conference Location: Toronto, ON, Canada, Canada
Conference Date: 21 August 2010
Page(s): 692 - 697
ISBN (CD): 978-1-4244-5448-8
ISBN (Electronic): 978-1-4244-5449-5
ISBN (Paper): 978-1-4244-5447-1
DOI: 10.1109/COASE.2010.5584273
Regular:

In this paper, the hysteresis modeling and compensation are carried out and verified for a piezo-driven XY parallel micropositioning stage aiming at a sub-micron precise motion tracking control.... View More

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