IEEE - Institute of Electrical and Electronics Engineers, Inc. - Automated high-speed nanopositioning inside scanning electron microscopes

2010 IEEE International Conference on Automation Science and Engineering (CASE 2010)

Author(s): Jasper, D. ; Fatikow, S.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 August 2010
Conference Location: Toronto, ON, Canada, Canada
Conference Date: 21 August 2010
Page(s): 704 - 709
ISBN (CD): 978-1-4244-5448-8
ISBN (Electronic): 978-1-4244-5449-5
ISBN (Paper): 978-1-4244-5447-1
DOI: 10.1109/COASE.2010.5584075
Regular:

This paper describes a new, automated positioning system that uses the scanning electron microscope as a fast, high-resolution sensor system. With two line scans and low computational overhead,... View More

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