IEEE - Institute of Electrical and Electronics Engineers, Inc. - A New Two-Dimensional Actuator for Air Flow Micro-manipulation

2010 First Workshop on Hardware and Software Implementation and Control of Distributed MEMS (DMEMS)

Author(s): Yahiaoui, R. ; Zeggari, R. ; Malapert, J. ; Manceau, J.-F.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2010
Conference Location: Besan, TBD, France, France
Conference Date: 28 June 2010
Page(s): 11 - 15
ISBN (Electronic): 978-1-4244-7223-9
ISBN (Paper): 978-1-4244-7222-2
DOI: 10.1109/dMEMS.2010.8
Regular:

A two dimensional pneumatic actuator based on silicon MEMS technology for objects micro-manipulation is presented. The device uses inclined air jets to levitate and convey micro-objects to the... View More

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