IEEE - Institute of Electrical and Electronics Engineers, Inc. - Applying Technique of Sacrificial Layer for the Fabrication of Microfilter

2010 4th International Conference on Bioinformatics and Biomedical Engineering (iCBBE)

Author(s): Yaw-Jen Chang ; Tat Yan Chan ; Jia-Hao Wang
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2010
Conference Location: Chengdu, China, China
Conference Date: 18 June 2010
Page(s): 1 - 3
ISBN (CD): 978-1-4244-4713-8
ISBN (Paper): 978-1-4244-4712-1
ISSN (CD): 2151-7614
ISSN (Electronic): 2151-7622
ISSN (Paper): 2151-7614
DOI: 10.1109/ICBBE.2010.5517146
Regular:

Biochip plays an important role in biotechnology and many scientists also pay a lot of attention on this product. Thus, in this study we used MEMS and sacrificial layer techniques to manufacture... View More

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