IEEE - Institute of Electrical and Electronics Engineers, Inc. - Stable and accurate trajectory control technology for the wafer transfer robot

2010 International Conference on Information and Automation (ICIA)

Author(s): Yanjie Liu ; Yong Hu ; Xiaofei Zheng
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2010
Conference Location: Harbin, China, China
Conference Date: 20 June 2010
Page(s): 1,336 - 1,340
ISBN (CD): 978-1-4244-5702-1
ISBN (Electronic): 978-1-4244-5704-5
ISBN (Paper): 978-1-4244-5701-4
DOI: 10.1109/ICINFA.2010.5512105
Regular:

During the processing of wafer, in order to avoid the friction between wafer and wafer box, and to guarantee the clean state of the working environment simultaneously, small contour error and... View More

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