IEEE - Institute of Electrical and Electronics Engineers, Inc. - P4-19: Tracing backscattered electrons in full energy range

2010 IEEE International Vacuum Electronics Conference (IVEC)

Author(s): Munro, E. ; Rouse, J. ; Xieqing Zhu ; Katsap, V.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 May 2010
Conference Location: Monterey, CA, USA, USA
Conference Date: 18 May 2010
Page(s): 483 - 484
ISBN (CD): 978-1-4244-7097-6
ISBN (Electronic): 978-1-4244-7099-0
ISBN (Paper): 978-1-4244-7098-3
DOI: 10.1109/IVELEC.2010.5503468
Regular:

It is critically important to know backscattered electron (BSE) trajectories and current density in electron beam lithography tools, where a 50 keV electron beam is incident upon the target plane.... View More

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