IEEE - Institute of Electrical and Electronics Engineers, Inc. - Design optimization in SOI-based high sensitivity piezoresistive cantilever devices

2010 5th International Conference on Design & Technology of Integrated Systems in Nanoscale Era (DTIS)

Author(s): Kebbati, Y. ; Boujrharhe, M.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 March 2010
Conference Location: Hammamet, Tunisia, Tunisia
Conference Date: 23 March 2010
Page(s): 1 - 5
ISBN (CD): 978-1-4244-6339-8
ISBN (Electronic): 978-1-4244-6340-4
ISBN (Paper): 978-1-4244-6338-1
DOI: 10.1109/DTIS.2010.5487599
Regular:

In this work, the authors present the new design of MEMS high-sensitivity piezoresistive cantilever. The prospect is to develop the tactile sensor for space mission. The finite element method with... View More

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