IEEE - Institute of Electrical and Electronics Engineers, Inc. - Identification of the coupling forces ratio in silicon vibratory MEMS gyroscopes

2010 IEEE Instrumentation & Measurement Technology Conference - I2MTC 2010

Author(s): Wenwen Zhou ; Zhiyong Chen ; Bin Zhou ; Rong Zhang
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 May 2010
Conference Location: Austin, TX, USA, USA
Conference Date: 3 May 2010
Page(s): 668 - 671
ISBN (CD): 978-1-4244-2833-5
ISBN (Paper): 978-1-4244-2832-8
ISSN (CD): 1091-5281
ISSN (Paper): 1091-5281
DOI: 10.1109/IMTC.2010.5488253
Regular:

This paper reports on the theory, implementation and experimental results of a novel method used to identify the coupling forces ratio in MEMS vibratory gyroscopes. This identification method is... View More

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