IEEE - Institute of Electrical and Electronics Engineers, Inc. - Contouring accuracy improvement of a dual-axis micro-positioning stage powered by piezoelectric actuator

2010 11th IEEE International Workshop on Advanced Motion Control (AMC)

Author(s): Chun-Ming Wen ; Ming-Yang Cheng ; Ke-Han Su
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 March 2010
Conference Location: Nagaoka, Japan, Japan
Conference Date: 21 March 2010
Page(s): 82 - 87
ISBN (Electronic): 978-1-4244-6670-2
ISBN (Paper): 978-1-4244-6668-9
ISBN (Online): 978-1-4244-6669-6
ISSN (Paper): 1943-6572
ISSN (Online): 1943-6572
DOI: 10.1109/AMC.2010.5464019
Regular:

In industrial precision applications using dual-axis micro-positioning stages powered by piezoelectric actuators (PEA), the trajectory tracking and contour following performances are limited due... View More

Advertisement