IEEE - Institute of Electrical and Electronics Engineers, Inc. - Measurement of elastic tension of Parylene films deposited on liquid

23rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2010)

Author(s): Nguyen Binh-khiem ; Kiyoshi Matsumoto ; Isao Shimoyama
Sponsor(s): IEEE
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2010
Conference Location: Wanchai, Hong Kong, China
Conference Date: 24 January 2010
Page(s): 556 - 559
ISBN (Electronic): 978-1-4244-5764-9
ISBN (Paper): 978-1-4244-5761-8
ISBN (Online): 978-1-4244-5763-2
ISSN (Electronic): 1084-6999
ISSN (Paper): 1084-6999
DOI: 10.1109/MEMSYS.2010.5442443
Regular:

Parylene films deposited on liquid surface induce film tension that changes the liquid shape. We observed that the force acting on the surface of Parylene-C encapsulated liquid bodies increased... View More

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