IEEE - Institute of Electrical and Electronics Engineers, Inc. - Design optimization of MEMS 2D scanning mirrors with high resonant frequencies

23rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2010)

Author(s): Wei Ma ; Ho-Yin Chan ; Chun Cheong Wong ; Yick Chuen Chan ; Chen-Jung Tsai ; Francis Chee Shuen Lee
Sponsor(s): IEEE
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2010
Conference Location: Wanchai, Hong Kong, China
Conference Date: 24 January 2010
Page(s): 823 - 826
ISBN (Electronic): 978-1-4244-5764-9
ISBN (Paper): 978-1-4244-5761-8
ISBN (Online): 978-1-4244-5763-2
ISSN (Electronic): 1084-6999
ISSN (Paper): 1084-6999
DOI: 10.1109/MEMSYS.2010.5442279
Regular:

An accurate and effective finite element method (FEM) based model for the MEMS electrostatically actuated 2D resonant scanning mirror is presently reported to analyze and predict the mirror's... View More

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