IEEE - Institute of Electrical and Electronics Engineers, Inc. - A high-power long pulse excimer laser

Author(s): T.J. McKee ; G. Boyd ; T.A. Znotins
Sponsor(s): IEEE Lasers and Electro-Optics Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 March 1989
Volume: 1
Page(s): 59 - 61
ISSN (Electronic): 1941-0174
ISSN (Paper): 1041-1135
DOI: 10.1109/68.87896
Regular:

Excimer lasers operating at high average powers are becoming important for materials-processing applications. A long-pulse excimer laser with automatic spark preionization which provides a... View More

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