IEEE - Institute of Electrical and Electronics Engineers, Inc. - A silicon electrostatic ultrasonic transducer

Author(s): K. Suzuki ; K. Higuchi ; H. Tanigawa
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 1989
Volume: 36
Page Count: 8
Page(s): 620 - 627
ISSN (Paper): 0885-3010
DOI: 10.1109/58.39112
Regular:

An electric ultrasonic transducer is developed by using a silicon IC process. Design considerations are first presented to obtain high sensitivity and the desired frequency responses in air. The... View More

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