IEEE - Institute of Electrical and Electronics Engineers, Inc. - Spatial frequency doubling lithography (SFDL) of periodic structures for integrated optical circuit technology

Author(s): T.E. Jewell ; D.L. White
Sponsor(s): IEEE Lasers and Electro-Optics Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 September 1989
Volume: 7
Page Count: 8
Page(s): 1,386 - 1,393
ISSN (Paper): 0733-8724
ISSN (Online): 1558-2213
DOI: 10.1109/50.50718
Regular:

A novel technique for fabricating gratings useful for integrated optical circuits (IOCs) is described. The technique combines optical projection lithography, partially coherent illumination, and... View More

Advertisement