IEEE - Institute of Electrical and Electronics Engineers, Inc. - Impact of time bound constraints and batching on metallization in an opto-semiconductor fab

2016 Winter Simulation Conference (WSC)

Author(s): Falk Stefan Pappert ; Tao Zhang ; Oliver Rose ; Fabian Suhrke ; Jonas Mager ; Thomas Frey
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 December 2016
Conference Location: Washington, DC, USA
Conference Date: 11 December 2016
Page(s): 2,947 - 2,957
ISBN (CD): 978-1-5090-4484-9
ISBN (Electronic): 978-1-5090-4486-3
ISBN (USB): 978-1-5090-4485-6
ISSN (Electronic): 1558-4305
DOI: 10.1109/WSC.2016.7822329
Regular:

Time bound sequences are constraints deemed necessary to ensure product quality and avoid yield loss due to time dependent effects. Although they are commonly applied in production system control... View More

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