IEEE - Institute of Electrical and Electronics Engineers, Inc. - Optimizing capacity assignment of multiple identical metrology tools

2016 Winter Simulation Conference (WSC)

Author(s): Stephane Dauzere-Peres ; Michael Hassoun ; Alejandro Sendon
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 December 2016
Conference Location: Washington, DC, USA
Conference Date: 11 December 2016
Page(s): 2,709 - 2,718
ISBN (CD): 978-1-5090-4484-9
ISBN (Electronic): 978-1-5090-4486-3
ISBN (USB): 978-1-5090-4485-6
ISSN (Electronic): 1558-4305
DOI: 10.1109/WSC.2016.7822308
Regular:

In modern semiconductor manufacturing facilities, metrology capacity is becoming limited because of the high equipment cost. This paper studies the problem of optimally assigning the capacity of... View More

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