IEEE - Institute of Electrical and Electronics Engineers, Inc. - A literature review on variability in semiconductor manufacturing: The next forward leap to Industry 4.0

2016 Winter Simulation Conference (WSC)

Author(s): Kean Dequeant ; Philippe Vialletelle ; Pierre Lemaire ; Marie-Laure Espinouse
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 December 2016
Conference Location: Washington, DC, USA
Conference Date: 11 December 2016
Page(s): 2,598 - 2,609
ISBN (CD): 978-1-5090-4484-9
ISBN (Electronic): 978-1-5090-4486-3
ISBN (USB): 978-1-5090-4485-6
ISSN (Electronic): 1558-4305
DOI: 10.1109/WSC.2016.7822298
Regular:

Semiconductor fabrication plants are subject to high levels of variability because of a variety of factors including re-entrant flows, multiple products, machine breakdowns, heterogeneous toolsets... View More

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