IEEE - Institute of Electrical and Electronics Engineers, Inc. - Automated transportation of auxiliary resources in a semiconductor manufacturing facility

2016 Winter Simulation Conference (WSC)

Author(s): Moulaye Aidara Ndiaye ; Stephane Dauzere-Peres ; Claude Yugma ; Lionel Rulliere ; Gilles Lamiable
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 December 2016
Conference Location: Washington, DC, USA
Conference Date: 11 December 2016
Page(s): 2,587 - 2,597
ISBN (CD): 978-1-5090-4484-9
ISBN (Electronic): 978-1-5090-4486-3
ISBN (USB): 978-1-5090-4485-6
ISSN (Electronic): 1558-4305
DOI: 10.1109/WSC.2016.7822297
Regular:

In this paper, we study the design of an Automated Guided Vehicle (AGV) transport system for the main auxiliary resource, the mask (also called reticle), in the photolithography area of a... View More

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