IEEE - Institute of Electrical and Electronics Engineers, Inc. - Effects of intrinsic stress on submicrometer Nb/AlO/sub x//Nb Josephson junctions

Author(s): T. Imamura ; S. Hasuo
Sponsor(s): IEEE Magnetics Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 March 1989
Volume: 25
Page Count: 4
Page(s): 1,119 - 1,122
ISSN (Paper): 0018-9464
ISSN (Online): 1941-0069
DOI: 10.1109/20.92486
Regular:

The intrinsic stress and its relaxation process are discussed for sputtered Nb films used for the electrodes in Nb/AlO/sub x//Nb Josephson junctions. The stress, optically measured for Nb films,... View More

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