IEEE - Institute of Electrical and Electronics Engineers, Inc. - Active-gas discharge cleaning and low-field electron emission

Author(s): M.D. Malev ; D.C. Weisser
Sponsor(s): IEEE
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 December 1989
Volume: 24
Page Count: 3
Page(s): 1,019 - 1,021
ISSN (Paper): 0018-9367
DOI: 10.1109/14.46330
Regular:

A method of cleaning surfaces employing the chemical interaction between bombarding ions and surface contaminants is proposed. The cleaning procedure consists of two steps: oxidation, which... View More

Advertisement