IEEE - Institute of Electrical and Electronics Engineers, Inc. - Development of high sensitivity CMOS-MEMS inertia sensor and its application to early-stage diagnosis of Parkinson's disease

2016 46th European Solid-State Device Research Conference (ESSDERC)

Author(s): Kazuya Masu ; Daisuke Yamane ; Katsuyuki Machida ; Masato Sone ; Yoshihiro Miyake
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 September 2016
Conference Location: Lausanne, Switzerland
Conference Date: 12 September 2016
Page(s): 91 - 96
ISBN (Electronic): 978-1-5090-2969-3
ISSN (Electronic): 2378-6558
DOI: 10.1109/ESSDERC.2016.7599596
Regular:

In this paper, we present our recent progress of a high sensitivity complementary metal-oxide semiconductor-microelectromechanical systems (CMOS-MEMS) inertia sensor and its application to... View More

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