IEEE - Institute of Electrical and Electronics Engineers, Inc. - Numerical modeling of the influences of the duty cycle on plasma immersion ion implantation

2016 3rd International Conference on Informative and Cybernetics for Computational Social Systems (ICCSS)

Author(s): Yi Li ; Xiaodan Jing ; Jiuhui Li
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 August 2016
Conference Location: Jinzhou, China
Conference Date: 26 August 2016
Page(s): 155 - 159
ISBN (CD): 978-1-5090-3366-9
ISBN (Electronic): 978-1-5090-3367-6
DOI: 10.1109/ICCSS.2016.7586441
Regular:

The low pressure non-steady diffusion fluid model and the sheath collision fluid model are built to describe the dynamic behaviors of multiple pulses sheath in the process of plasma immersion ion... View More

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