IEEE - Institute of Electrical and Electronics Engineers, Inc. - Optimization of finger spacing and spring constant in comb type capacitive accelerometer

2016 IEEE International Nanoelectronics Conference (INEC)

Author(s): Zakriya Mohammed ; Mahmoud Rasras
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 May 2016
Conference Location: Chengdu, China
Conference Date: 9 May 2016
Page(s): 1 - 2
ISBN (Electronic): 978-1-4673-8969-3
ISSN (Electronic): 2159-3531
DOI: 10.1109/INEC.2016.7589291
Regular:

In variable gap changing capacitive accelerometer with two different gap spacing (finger gap and anti-finger gap) it is necessary to optimize the gap spacing to enhance sensitivity. In addition... View More

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