IEEE - Institute of Electrical and Electronics Engineers, Inc. - Design and stiffness analysis of a XYZ scanning stage

2016 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)

Author(s): Kunhai Cai ; Yanling Tian ; Liangyu Cui ; Zhen Yang ; Dawei Zhang
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 July 2016
Conference Location: Paris, France
Conference Date: 18 July 2016
Page(s): 1 - 6
ISBN (Electronic): 978-1-5090-1510-8
DOI: 10.1109/MARSS.2016.7561572
Regular:

A compact XYZ precision scanning stage is designed in this paper, which is assembled by a XY and a Z precision positioning stages. Each stage is driven by piezoelectric actuator, and guided by... View More

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