IEEE - Institute of Electrical and Electronics Engineers, Inc. - Employing model based failure mode and effect analysis for sputtering process

2016 39th International Spring Seminar on Electronics Technology (ISSE)

Author(s): M. Molhanec ; I. Beshajova-Pelikanova
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 May 2016
Conference Location: Pilsen, Czech Republic
Conference Date: 18 May 2016
Page(s): 285 - 289
ISBN (Electronic): 978-1-5090-1389-0
ISSN (Electronic): 2161-2064
DOI: 10.1109/ISSE.2016.7563206
Regular:

This contribution introduces Failure Mode and Effect Analysis (FMEA) method applied to sputtering process. A model based paradigm is used for executing the FMEA method. The Authors employ this... View More

Advertisement