IEEE - Institute of Electrical and Electronics Engineers, Inc. - Application and evaluation of direct-write electron beam for ASICs

Author(s): M. Fujita ; K. Shiozawa ; T. Kase ; H. Hayakawa ; F. Mizuno ; R. Haruta ; F. Murai ; S. Okazaki
Sponsor(s): IEEE Solid-State Circuits Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 April 1988
Volume: 23
Page Count: 6
Page(s): 514 - 519
ISSN (Paper): 0018-9200
ISSN (Online): 1558-173X
DOI: 10.1109/4.1015
Regular:

The application of direct-write electron-beam (DW-EB) technology to 1.3- mu m fine geometry and high-density 24 K-gate CMOS VLSI is investigated. Particular attention is paid to EB radiation... View More

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